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Summary of High Throughput Methods for Study of Thin Film Alloys

He Zhang
pp.27-29 DOI: 10.62051/t8myqm76 October 12, 2023
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Abstract: In the fields of semiconductor and electronics, fine processing at the micro and nanoscale is crucial. Thin film materials are an important part of this fine processing and their small molecular structure, ranging from microns to nanometers, is directly linked to achieving high throughput. Breakthroughs in thin film materials have accelerated research on high throughput systems and ultimately enabled mass production.
Keywords: Thin Film Materials; High-throughput Techniques; Ta-Ti Alloys.
APA Citation: He Zhang (2023). Summary of High Throughput Methods for Study of Thin Film Alloys. Transactions on Computer Science and Intelligent Systems Research, 1(1), 27-29. https://doi.org/10.62051/t8myqm76

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